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  • Microsystems & Nanoengineering

    Detection of mitochondrial bioenergetics using a novel bimodal 3D microelectrode array (MEA)-based biosensor

    https://www.nature.com/articles/s41378-026-01275-4
    Randall K. James

    A Rapid-prototyping CMOS-RRAM Integration Strategy

    https://www.nature.com/articles/s41378-026-01335-9
    Andreas Tsiamis

    Compact adaptive spectral imager enabled by MEMS Fabry-Perot filtering chip in longwave infrared

    https://www.nature.com/articles/s41378-026-01300-6
    Kui Zhou

    Three-phase ScAlN-based PMUT-driven acoustic streaming micropump

    https://www.nature.com/articles/s41378-026-01339-5
    Chen Wu

    Broad pH-resistant microdroplet SERS platform based on Ag@SiO2@PVP NPs for real-time analysis of microbial metabolites

    https://www.nature.com/articles/s41378-026-01311-3
    Haixia Zhao

    A curved-beam piezoelectric MEMS resonator featuring multiple temperature plateaus with enhanced stability

    https://www.nature.com/articles/s41378-026-01323-z
    Yancheng Lian

    Multilayered microelectrode array for monitoring electrophysiological signals of 3d neural networks in cerebral organoid

    https://www.nature.com/articles/s41378-026-01328-8
    Namyun Kim

    Manufacturing of 8 million Q-factor micro hemispherical resonator gyroscopes via patterned coating technology

    https://www.nature.com/articles/s41378-026-01321-1
    Feng Zhu